Wafer Clamp Ring | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)

Shen-Yueh's Vespel Clamp Ring is used in dry etching Applied (AMAT) machines. The wafer clamping ring provides a secure wafer clamping force to ensure that your wafer remains in a stable position to ensure process stability. In addition, we use DuPont VESPEL material (PI alternative is also available). VESPEL and PI have high performance material characteristics, making the wafer clamping ring (Clamp Ring) have good resistance to high temperature and wear, and can withstand extreme environment and pressure environment applications, and can withstand long-term operating temperature of 288°C (550°F), one of the few suitable high-grade engineering plastics suitable for use in plasma environments.
Our Clamp Ring customization service is also available to meet your specific needs and can provide you with the best solution based on your design, size and material selection.
Should you have any questions or needs regarding our products and services, please feel free to contact us through the form below. Shen-Yueh (SYT) is a high-quality Wafer Clamp Ring, SY's Wafer CLAMP RING: One of few advanced engineering plastics suited for plasma use. manufacturer from Taiwan since 2006.

VESPEL CLAMP RING 7 CLAW / PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)

SY's Wafer CLAMP RING: One of few advanced engineering plastics suited for plasma use. / We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006).

Wafer Clamp Ring - SY's Wafer CLAMP RING: One of few advanced engineering plastics suited for plasma use.
  • Wafer Clamp Ring - SY's Wafer CLAMP RING: One of few advanced engineering plastics suited for plasma use.
  • Shen-Yueh VESPEL CLAMP RING: Ensuring stable wafer fixation
Wafer Clamp Ring

VESPEL CLAMP RING 7 CLAW

Shen-Yueh's Vespel Clamp Ring is used in dry etching Applied (AMAT) machines. The wafer clamping ring provides a secure wafer clamping force to ensure that your wafer remains in a stable position to ensure process stability. In addition, we use DuPont VESPEL material (PI alternative is also available). VESPEL and PI have high performance material characteristics, making the wafer clamping ring (Clamp Ring) have good resistance to high temperature and wear, and can withstand extreme environment and pressure environment applications, and can withstand long-term operating temperature of 288°C (550°F), one of the few suitable high-grade engineering plastics suitable for use in plasma environments.

Our Clamp Ring customization service is also available to meet your specific needs and can provide you with the best solution based on your design, size and material selection.

Should you have any questions or needs regarding our products and services, please feel free to contact us through the form below.

Product Specifications
  • Product Material: Vespel、PI
  • Wafer size: 6", 8"
  • Customized sizes are available according to your equipment requirements.

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More Details

SY's Wafer CLAMP RING: One of few advanced engineering plastics suited for plasma use. | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)

Located in Taiwan since 2006, Shen-Yueh Technology co., Ltd. has been a CNC plastic and metal machining manufacturer in Metal Processing Industry. Their main CNC machining supplies include, Wafer Clamp Ring, CNC plastic machining, air knife productions, PEEK plastic machining and fabrication, CNC metal machining, Polyimide (PI) plastic CNC machining and milling, and bearing, which are delivered with expanded production capacity, short lead time, and better customer service.

SHEN-YUEH is composed of semiconductor equipment and machining design personnel who cooperate with the CNC professional technician team, which has more than 10 years of experience. The production process is carried out in accordance with ISO and a clean factory environment to provide excellent professional consultations and service! We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006). For more than 10 years, we have solved problems of design, development, and organization optimization and increased the lifecycle of parts, reducing costs for many customers and quickly providing manufacturing samples to reduce customer development time.

Shen-Yueh (SYT) has been offering high-quality equipment part manufacturing for semiconductor manufacturing department, panel and comprehensive industries, both with advanced engineering technology and 13 years of experience, Shen-Yueh (SYT) ensures each customer's demands are met.