Electrostatic Chuck Cover | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
We specialize in manufacturing Electrostatic Chuck Covers compatible with etching machines from TEL, LAM Research, Applied Materials, and other brands. This product is specifically designed for preventive maintenance (PM) to effectively protect the lower electrode from damage while preventing external interferences, ensuring the integrity of the electrode area. By reducing the risk of operational errors, this cover helps customers maintain equipment more efficiently, significantly minimizing downtime.
Additionally, we offer customization services tailored to different environments, sizes, and materials, and we accept small order requests. For more information or further consultation, please fill out the form below to get in touch with us. Shen-Yueh (SYT) is a high-quality Electrostatic Chuck Cover, Shen-Yueh manufactures Electrostatic Chuck Covers compatible with etching machines from TEL, LAM Research, Applied Materials, and other leading brands. manufacturer from Taiwan since 2006.
Electrostatic Chuck Cover
BSP ESC COVER、Electrode Shield
We specialize in manufacturing Electrostatic Chuck Covers compatible with etching machines from TEL, LAM Research, Applied Materials, and other brands. This product is specifically designed for preventive maintenance (PM) to effectively protect the lower electrode from damage while preventing external interferences, ensuring the integrity of the electrode area. By reducing the risk of operational errors, this cover helps customers maintain equipment more efficiently, significantly minimizing downtime.
Additionally, we offer customization services tailored to different environments, sizes, and materials, and we accept small order requests. For more information or further consultation, please fill out the form below to get in touch with us.
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Product Features
- Simplified Maintenance Process:
The protective cover design effectively simplifies operational steps during equipment maintenance, reduces the risk of operational errors, and enhances work efficiency. - Protects Equipment Safety:
Specifically designed for the lower electrode area, it effectively prevents damage and short circuits during maintenance and reduces the risk of wafer damage, improving production yield. - Quick Installation:
The user-friendly design allows maintenance personnel to complete operations quickly, significantly reducing maintenance time and enhancing production efficiency. - Reduced Maintenance Costs:
Reduces the likelihood of equipment damage, extends lifespan, and effectively lowers repair and part replacement costs, minimizing overall maintenance expenditure.
Product Specifications
- Compatible Machines: TEL, LAM Research, Applied Materials, and other etching equipment
- Specifications: 6-inch, 8-inch, 12-inch （custom designs available for sizes beyond these specifications.）
- Material: POM (commonly used material)（customizable based on different environmental requirements.）
Contact Us
If you're looking to enhance equipment maintenance efficiency, ensure equipment stability, or explore protective cover applications, feel free to contact us!
Email: service@sy-tech.com.tw
Kindly fill out the form below, and we will get back to you promptly!
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Popular Products
Shen-Yueh manufactures Electrostatic Chuck Covers compatible with etching machines from TEL, LAM Research, Applied Materials, and other leading brands. | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
Located in Taiwan since 2006, Shen-Yueh Technology co., Ltd. has been a CNC plastic and metal machining manufacturer in Metal Processing Industry. Their main CNC machining supplies include, Electrostatic Chuck Cover, CNC plastic machining, air knife productions, PEEK plastic machining and fabrication, CNC metal machining, Polyimide (PI) plastic CNC machining and milling, and bearing, which are delivered with expanded production capacity, short lead time, and better customer service.
SHEN-YUEH is composed of semiconductor equipment and machining design personnel who cooperate with the CNC professional technician team, which has more than 10 years of experience. The production process is carried out in accordance with ISO and a clean factory environment to provide excellent professional consultations and service! We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006). For more than 10 years, we have solved problems of design, development, and organization optimization and increased the lifecycle of parts, reducing costs for many customers and quickly providing manufacturing samples to reduce customer development time.
Shen-Yueh (SYT) has been offering high-quality equipment part manufacturing for semiconductor manufacturing department, panel and comprehensive industries, both with advanced engineering technology and 13 years of experience, Shen-Yueh (SYT) ensures each customer's demands are met.