Wafer Fork
Our Wafer Fork is designed for 6-inch, 8-inch, and 12-inch wafers, ensuring stable and secure handling while preventing slippage and dropping. Made from high-wear-resistant materials, it enhances durability and gripping precision, ensuring long-term reliability, making it ideal for cleanroom environments and precision manufacturing.
In applications such as EFEM, automation equipment, Load Port, and etching, the Wafer Fork is an essential wafer-handling tool. We offer optimized surface treatment and high-stability clamping designs to ensure safe wafer transfer, minimize breakage risks, and improve yield rates. Additionally, we can assist customers in designing and manufacturing vacuum channels to enhance stability and accuracy during wafer gripping, further optimizing handling efficiency to meet high-end manufacturing requirements.
We also provide material consultation services tailored to specific process environments, helping you choose the most suitable Wafer Fork. Feel free to contact us via the form below, and we will get back to you as soon as possible.
Product Applications
EFEM, automated robotic arms, load ports, etching, and other semiconductor processes
Product Advantages
- High-Efficiency Vacuum Suction: Factory default vacuum pressure of approximately -70kPa ensures stable gripping, preventing wafer slippage and drops.
- Lightweight: Made of lightweight materials to reduce equipment load and improve robotic arm operation efficiency.
- Stable Gripping: Precisely designed vacuum flow channels ensure even force distribution during wafer handling, reducing the risk of breakage.
- High Durability: Constructed from wear-resistant materials, making it suitable for long-term high-frequency use, extending equipment lifespan.
- Cleanroom Compatibility: Optimized surface treatment minimizes particle contamination, ensuring process stability.
- Customizable Design: Vacuum flow channels and gripping mechanisms can be adjusted based on specific requirements to enhance equipment compatibility.
Product Specifications & Options
- Material: Aluminum Alloy, Titanium Alloy, Molybdenum
- Wafer Sizes: 150mm (6-inch), 200mm (8-inch) (Customizable for 100mm (4-inch) and 300mm (12-inch) upon request)
- Vacuum Flow Channels: Custom-designed based on wafer suction requirements
- Surface Coating: Anodizing, Hard Anodizing, PTFE Coating
Customization services are available based on application needs. Feel free to contact us for inquiries!
Other Fork types (Support Type Wafer Fork)
- Fork (Support Type) - Precision Alignment Design Designed to match the wafer’s rounded edges, ensuring stable support and high-precision alignment.
- Fork (Support Type) - Stable Support Structure Specially designed to prevent wafer movement, enhancing safety and process stability.
- Fork (Support Type) - High-Durability Material Made from wear-resistant materials to reduce abrasion, suitable for semiconductor processing.
Vacuum Wafer Fork - Precision Design Compatible with 6-inch, 8-inch, and 12-inch wafers, ensuring stable handling and preventing slippage or drops. | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
Located in Taiwan since 2006, Shen-Yueh Technology co., Ltd. has been a CNC plastic and metal machining manufacturer in Metal Processing Industry. Their main CNC machining supplies include, Wafer Fork, CNC plastic machining, air knife productions, PEEK plastic machining and fabrication, CNC metal machining, Polyimide (PI) plastic CNC machining and milling, and bearing, which are delivered with expanded production capacity, short lead time, and better customer service.
SHEN-YUEH is composed of semiconductor equipment and machining design personnel who cooperate with the CNC professional technician team, which has more than 10 years of experience. The production process is carried out in accordance with ISO and a clean factory environment to provide excellent professional consultations and service! We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006). For more than 10 years, we have solved problems of design, development, and organization optimization and increased the lifecycle of parts, reducing costs for many customers and quickly providing manufacturing samples to reduce customer development time.
Shen-Yueh (SYT) has been offering high-quality equipment part manufacturing for semiconductor manufacturing department, panel and comprehensive industries, both with advanced engineering technology and 13 years of experience, Shen-Yueh (SYT) ensures each customer's demands are met.